Comparative study of stress inducing layers to produce kerfless thin wafers by the slim-cut technique

Serra, Joo ManuelJoo ManuelSerraBellanger, PierrePierreBellangerLobato, KillianKillianLobatoMartini, RobertoRobertoMartiniDebucquoy, MaartenMaartenDebucquoyPoortmans, JefJefPoortmans2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23070Comparative study of stress inducing layers to produce kerfless thin wafers by the slim-cut techniqueProceedings paper