Kok, A.A.M.A.A.M.KokGeluk, E.J.E.J.Gelukvan der Tol, J.J.G.M.J.J.G.M.van der TolKarouta, F.F.KaroutaBaets, RoelRoelBaetsSmit, M.K.M.K.Smit2021-10-162021-10-162007-12https://imec-publications.be/handle/20.500.12860/12416Fabrication and characterization of pillar-based photonic crystal waveguidesProceedings paper