Sousa Lopes, TomasTomasSousa LopesTeixeira, J. P.J. P.TeixeiraCurado, M. A.M. A.CuradoFerreira, B. R.B. R.FerreiraOliveira, A. J. N.A. J. N.OliveiraCunha, J. M. V.J. M. V.CunhaMonteiro, M.M.MonteiroViolas, A.A.ViolasBarbosa, J. R. S.J. R. S.BarbosaSousa, P. C.P. C.SousaÇaha, I.I.ÇahaBorme, J.J.BormeOliveira, K.K.OliveiraRing, J.J.RingChen, W. C.W. C.ChenZhou, Y.Y.ZhouTakei, K.K.TakeiNiemi, E.E.NiemiDeepak, F. L.F. L.DeepakEdoff, M.M.EdoffBrammertz, GuyGuyBrammertzFernandes, P. A.P. A.FernandesVermang, BartBartVermangSalomé, P. M. P.P. M. P.Salomé2023-07-062023-03-032023-07-0620232397-4621WOS:000924992800001https://imec-publications.be/handle/20.500.12860/41220Journal article10.1038/s41528-023-00237-4WOS:000924992800001HIGH V-OCNANOIMPRINT LITHOGRAPHYEFFICIENCYPASSIVATIONGLASSOPTIMIZATIONTRANSISTORSNA