Insight in nucleation mechanisms of semiconducting 2D metal sulfides and application to area selective deposition

Delabie, AnneliesAnneliesDelabieTomczak, YoannYoannTomczakHeyne, MarkusMarkusHeyneGroven, BenjaminBenjaminGrovenvan Pelt, ThomasThomasvan PeltZhang, HaodongHaodongZhangDe Gendt, StefanStefanDe GendtVan Elshocht, SvenSvenVan ElshochtCaymax, MattyMattyCaymaxRadu, IulianaIulianaRadu2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28204Insight in nucleation mechanisms of semiconducting 2D metal sulfides and application to area selective depositionMeeting abstracthttp://www.nanomanufacturing.nl/ASD2017/programbook.pdf