Cleaning, rinsing and drying issues in post-Cu CMP cleaning: a case study

Fyen, WimWimFyenVos, RitaRitaVosVrancken, EviEviVranckenGrillaert, J.J.GrillaertMeuris, MarcMarcMeurisHeyns, MarcMarcHeyns2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6341Cleaning, rinsing and drying issues in post-Cu CMP cleaning: a case studyProceedings paper