Fabrication, doping and characterization of strained silicon on SiO2 by ion beam techniques

Hollaender, BerndBerndHollaenderBuca, DanDanBucaTrinkaus, H.H.TrinkausMantl, SiegfriedSiegfriedMantlLoo, RogerRogerLooReiche, ManfredManfredReiche2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13884Fabrication, doping and characterization of strained silicon on SiO2 by ion beam techniquesOral presentation