Rottenberg, XavierXavierRottenbergCzarnecki, PiotrPiotrCzarneckiTilmans, HarrieHarrieTilmansDe Raedt, WalterWalterDe RaedtDe Wolf, IngridIngridDe Wolf2021-10-172021-10-172008-04https://imec-publications.be/handle/20.500.12860/14395Multi-physics simulation and reliability analysis for RF-MEMS devicesProceedings paper