Epitaxial registry and crystallinity of MoS2 via molecular beam and metalorganic vapor phase van der Waals epitaxy

Mortelmans, WouterWouterMortelmansEl Kazzi, SalimSalimEl KazziGroven, BenjaminBenjaminGrovenNalin Mehta, AnkitAnkitNalin MehtaBalaji, YashwanthYashwanthBalajiDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeynsMerckling, ClementClementMerckling2021-10-292021-10-2920200003-6951https://imec-publications.be/handle/20.500.12860/35613Epitaxial registry and crystallinity of MoS2 via molecular beam and metalorganic vapor phase van der Waals epitaxyJournal articlehttps://doi.org/10.1063/5.0013391