Energy barriers between (100)Si and Al2O3 and ZrO2-based dielectric stacks: internal electron photoemission measurements

Afanas'ev, V. V.V. V.Afanas'evHoussa, MichelMichelHoussaStesmans, AndreAndreStesmansAdriaenssens, G. J.G. J.AdriaenssensHeyns, MarcMarcHeyns2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5007Energy barriers between (100)Si and Al2O3 and ZrO2-based dielectric stacks: internal electron photoemission measurementsJournal article