Selective wet etching of Hf-based layers

Claes, MartineMartineClaesParaschiv, VasileVasileParaschivBoutkabout, HakimHakimBoutkaboutDe Gendt, StefanStefanDe GendtRichard, OlivierOlivierRichardLindsay, RichardRichardLindsayBoullart, WernerWernerBoullartHeyns, MarcMarcHeyns2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7324Selective wet etching of Hf-based layersMeeting abstract