Photo-definable polyimide-based flat UTCP technology for 3D-stacking application

Priyabadini, SwarnakamalSwarnakamalPriyabadiniSterken, TomTomSterkenOp de Beeck, MaaikeMaaikeOp de BeeckVanfleteren, JanJanVanfleteren2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22956Photo-definable polyimide-based flat UTCP technology for 3D-stacking applicationProceedings paper