De Moor, PietPietDe MoorBaert, KrisKrisBaertDu Bois, BertBertDu BoisJamieson, GeraldineGeraldineJamiesonJourdain, AnneAnneJourdainTilmans, HarrieHarrieTilmansVan De Peer, MyriamMyriamVan De PeerWitvrouw, AnnAnnWitvrouwVan Hoof, ChrisChrisVan Hoof2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7438Low temperature zero-level hermetic packaging for MEMS based on solder and polymer bondingMeeting abstract