Silicon nitride photonic integration for visible light applications

Porcel, MarcoMarcoPorcelHinojosa, AlbertoAlbertoHinojosaJans, HildeHildeJansStassen, AndimAndimStassenGoyvaerts, JeroenJeroenGoyvaertsGeuzebroek, DouweDouweGeuzebroekGeiselmann, MichaelMichaelGeiselmannDoinguez,DoinguezArtundo, InigoInigoArtundo2021-10-272021-10-272019-04Elsevierhttps://imec-publications.be/handle/20.500.12860/33817Silicon nitride photonic integration for visible light applicationsJournal articlehttps://doi.org/10.1016/j.optlastec.2018.10.059