Gong, ChunChunGongSimoen, EddyEddySimoenYang, RuiRuiYangPosthuma, NielsNielsPosthumaVan Kerschaver, EmmanuelEmmanuelVan KerschaverPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15364Investigation of fired and non-fired Si-SiNx interface properties by deep-level transient spectroscopy measurementsProceedings paper