Non-destructive extraction of junction depths of active doping profiles from photomodulated optical reflectance offset curves

Bogdanowicz, JanuszJanuszBogdanowiczDortu, FabianFabianDortuClarysse, TrudoTrudoClarysseVandervorst, WilfriedWilfriedVandervorstRosseel, ErikErikRosseelNguyen, DuyDuyNguyenShaughnessy, DerrickDerrickShaughnessySalnick, AlexAlexSalnickNicolaides, LenaLenaNicolaides2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15015Non-destructive extraction of junction depths of active doping profiles from photomodulated optical reflectance offset curvesProceedings paper