Gray, W.D.W.D.GrayLoboda, M.J.M.J.LobodaBremmer, J.N.J.N.BremmerStruyf, HerbertHerbertStruyfLepage, MurielMurielLepageVan Hove, MarleenMarleenVan HoveAlves Donaton, RicardoRicardoAlves DonatonSleeckx, ErikErikSleeckxStucchi, MicheleMicheleStucchiLanckmans, FilipFilipLanckmansGao, TengTengGaoBoullart, WernerWernerBoullartCoenegrachts, BartBartCoenegrachtsMaenhoudt, MireilleMireilleMaenhoudtVanhaelemeersch, SergeSergeVanhaelemeerschMeynen, H.H.MeynenMaex, KarenKarenMaex2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7628Process optimization and integration of trimethylsilane-deposited a-SiC:H and a-SiCO:H dielectric thin films for damascene processingJournal article