Integration of silicon nitride photonics with nanoscale materials: from passive to active photonics ICs

Xie, WeiqiangWeiqiangXieZhu, YunpengYunpengZhuAubert, TangiTangiAubertHens, ZegerZegerHensBrainis, EdouarduEdouarduBrainisVan Thourhout, DriesDriesVan Thourhout2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27612Integration of silicon nitride photonics with nanoscale materials: from passive to active photonics ICsProceedings paper