Capacitance measurements of 2-dimensional and 3-dimensional IC interconnect structures by quasi-static C-V technique

Stucchi, MicheleMicheleStucchiVelenis, DimitriosDimitriosVelenisKatti, GuruprasadGuruprasadKatti2021-10-202021-10-2020120018-9456https://imec-publications.be/handle/20.500.12860/21565Capacitance measurements of 2-dimensional and 3-dimensional IC interconnect structures by quasi-static C-V techniqueJournal article