Brand, SebastianSebastianBrandKogel, MichaelMichaelKogelAltmann, FrankFrankAltmannDe Wolf, IngridIngridDe WolfKhaled, AhmadAhmadKhaledMoore, Michael J.Michael J.MooreStrohm, Eric M.Eric M.StrohmKolios, Michael C.Michael C.KoliosStrohm, Eric. M.Eric. M.Strohm2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/27927Acoustic and photoacoustic inspection of through-silicon-vias in the GHz-frequency bandProceedings paper