Optical micro-machined ultrasound sensors with a silicon photonic resonator in a buckled acoustical membrane

Westerveld, WouterWouterWesterveldLeinders, SuzanneSuzanneLeindersvan Neer, PaulPaulvan NeerUrbach, PaulPaulUrbachde Jong, NicoNicode JongVerweij, MartinMartinVerweijRottenberg, XavierXavierRottenbergRochus, VeroniqueVeroniqueRochus2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/34436Optical micro-machined ultrasound sensors with a silicon photonic resonator in a buckled acoustical membraneProceedings paperhttps://ieeexplore.ieee.org/document/8724528