Vermang, BartBartVermangGoverde, HansHansGoverdeCornagliotti, EmanueleEmanueleCornagliottiPrajapati, VictorVictorPrajapatiSimoen, EddyEddySimoenMorato, AlessandroAlessandroMoratoTous, LoicLoicTousUruena De Castro, AngelAngelUruena De CastroChoulat, PatrickPatrickChoulatRothschild, AudeAudeRothschildJohn, JoachimJoachimJohnPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21787Atomic layer deposition of Al2O3 as rear surface passivation for p-type Si passivated emitter and rear cells: an overviewOral presentation