Goethals, MiekeMiekeGoethalsPollers, IngridIngridPollersJaenen, PatrickPatrickJaenenVan Roey, FriedaFriedaVan RoeyRonse, KurtKurtRonseHeskamp, B.B.HeskampDavies, G.G.Davies2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3467193 nm lithography on a full field scannerProceedings paper