Grown-in defect density spectra in czochralski silicon wafers

Kissinger, G.G.KissingerGräf, D.D.GräfLambert, U.U.LambertVanhellemont, JanJanVanhellemontRichter, H.H.Richter2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1298Grown-in defect density spectra in czochralski silicon wafersOral presentation