Near-field characterization of SOI photonic crystal structures

Benyattou, T.T.BenyattouOrobtchouk, R.R.OrobtchoukDumon, PieterPieterDumonVan Thourhout, DriesDriesVan ThourhoutNeel, D.D.Neel2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10084Near-field characterization of SOI photonic crystal structuresProceedings paper