Challenges in using optical lithography for the building of a 22 nm node 6T=-SRAM cell

Ercken, MoniqueMoniqueErckenAltamirano Sanchez, EfrainEfrainAltamirano SanchezBaerts, ChristinaChristinaBaertsBrus, StephanStephanBrusDe Backer, JohanJohanDe BackerDelvaux, ChristieChristieDelvauxDemand, MarcMarcDemandHoriguchi, NaotoNaotoHoriguchiLocorotondo, SabrinaSabrinaLocorotondoVandeweyer, TomTomVandeweyerVeloso, AnabelaAnabelaVelosoVerhaegen, StafStafVerhaegen2021-10-182021-10-1820100167-9317https://imec-publications.be/handle/20.500.12860/17078Challenges in using optical lithography for the building of a 22 nm node 6T=-SRAM cellJournal article