Channel hot-carrier degradation in pMOS and nMOS short channel transistors with high-k dielectric stack

Amat, EsteveEsteveAmatKauerauf, ThomasThomasKaueraufDegraeve, RobinRobinDegraeveRodríguez, RosanaRosanaRodríguezNafría, MontseMontseNafríaAymerich, XavierXavierAymerichGroeseneken, GuidoGuidoGroeseneken2021-10-182021-10-1820100167-9317https://imec-publications.be/handle/20.500.12860/16649Channel hot-carrier degradation in pMOS and nMOS short channel transistors with high-k dielectric stackJournal article