Composite polymer core-silica shell abrasives: the effect of the shape of the silica particles on oxide CMP

Armini, SilviaSilviaArminiWhelan, CarolineCarolineWhelanMoinpour, MansourMansourMoinpourMaex, KarenKarenMaex2021-10-172021-10-1720080013-4651https://imec-publications.be/handle/20.500.12860/13314Composite polymer core-silica shell abrasives: the effect of the shape of the silica particles on oxide CMPJournal article