Effect of the built-in stress level of AlN layers on their dielectric and piezoelectric properties with perspectives on energy harvesting

Karakaya, KorayKorayKarakayaRenaud, MichaelMichaelRenaudGoedbloed, MartijnMartijnGoedbloedvan Schaijk, RobRobvan Schaijk2021-10-172021-10-1720080960-1317https://imec-publications.be/handle/20.500.12860/13938Effect of the built-in stress level of AlN layers on their dielectric and piezoelectric properties with perspectives on energy harvestingJournal article