Impact of lateral charge migration on the retention performance of planar and 3D SONOS devices

Maconi, AlessadroAlessadroMaconiArreghini, AntonioAntonioArreghiniMonzio Compagnoni, ChristianChristianMonzio CompagnoniVan den Bosch, GeertGeertVan den BoschSpinelli, Alessandro S.Alessandro S.SpinelliVan Houdt, JanJanVan HoudtLacaita, Andrea LeonardoAndrea LeonardoLacaita2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19352Impact of lateral charge migration on the retention performance of planar and 3D SONOS devicesProceedings paper