Zn doping of InP, InAsP/InP, and InAsP/InGaAs heterostructures through metalorganic vapor phase diffusion (MOVPD)

Vanhollebeke, KoenKoenVanhollebekeD'Hondt, MarkMarkD'HondtMoerman, IngridIngridMoermanVan Daele, PeterPeterVan DaeleDemeester, PietPietDemeester2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5794Zn doping of InP, InAsP/InP, and InAsP/InGaAs heterostructures through metalorganic vapor phase diffusion (MOVPD)Journal article