A Pathway for the Integration of Novel Ferroelectric Thin Films on Non-Planar Photonic Integrated Circuits

Lievens, EnesEnesLievensDe Geest, KobeKobeDe GeestPicavet, EwoutEwoutPicavetVan Landschoot, LiesbetLiesbetVan LandschootVrielinck, HenkHenkVrielinckFeutmba, Gilles FreddyGilles FreddyFeutmbaRijckaert, HannesHannesRijckaertDe Buysser, KlaartjeKlaartjeDe BuysserVan Thourhout, DriesDriesVan ThourhoutBienstman, PeterPeterBienstmanBeeckman, JeroenJeroenBeeckman2025-04-032025-04-032025-MAR 1WOS:001452734900001https://imec-publications.be/handle/20.500.12860/45492A Pathway for the Integration of Novel Ferroelectric Thin Films on Non-Planar Photonic Integrated CircuitsJournal article10.3390/mi16030334WOS:001452734900001ELECTRON-BEAM LITHOGRAPHYHYDROGEN SILSESQUIOXANEPLANARIZATIONMEDLINE:40141945