Meura, Kim-Anh Bui-ThiKim-Anh Bui-ThiMeuraTorregrosa, FrankFrankTorregrosaRobbes, Anne-SophieAnne-SophieRobbesChoi, SeoyounSeoyounChoiMerkulov, AlexandreAlexandreMerkulovMoret, MonaMonaMoretDuchaine, JulianJulianDuchaineHoriguchi, NaotoNaotoHoriguchiLi, LetianLetianLiMitterbauer, ChristophChristophMitterbauer2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24247Characterization of arsenic PIII Implants in FinFETs by LEXES, SIMS and STEM-EDXProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6940011