Germanium Content Dependence of Radiation Damage in Electron-Irradiated Strained Si1-xGex Epitaxial Devices

Ohyama, HidenoriHidenoriOhyamaVanhellemont, JanJanVanhellemontSunaga, H.H.SunagaPoortmans, JefJefPoortmansCaymax, MattyMattyCaymaxClauws, P.P.Clauws2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/277Germanium Content Dependence of Radiation Damage in Electron-Irradiated Strained Si1-xGex Epitaxial DevicesJournal article