Statistical analysis of shallow P-N junction leakage increase using XTEM results probabilities

Czerwinski, A.A.CzerwinskiKatcki, J.J.KatckiPoyai, AmpornAmpornPoyaiSimoen, EddyEddySimoenClaeys, CorCorClaeysRatajczak, J.J.RatajczakGaubas, EugenijusEugenijusGaubas2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5174Statistical analysis of shallow P-N junction leakage increase using XTEM results probabilitiesJournal article