Vereecke, GuyGuyVereeckeVeltens, T.T.VeltensEitoku, A.A.EitokuSano, Ken-IchiKen-IchiSanoDoumen, GeertGeertDoumenFyen, WimWimFyenWostyn, KurtKurtWostynSnow, J.J.SnowMertens, PaulPaulMertens2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14740Removal of nano-particles by mixed-fluid jet: evaluation of cleaning performance and comparison with megasonicProceedings paper