A capacitive MEMS energy harvester for shock-induced periodic excitations

Vysotskyi, BogdanBogdanVysotskyiRochus, VeroniqueVeroniqueRochus2022-08-292022-07-042022-08-112022-08-292022978-1-6654-5836-8WOS:000812322900014https://imec-publications.be/handle/20.500.12860/40050A capacitive MEMS energy harvester for shock-induced periodic excitationsProceedings paper10.1109/EuroSimE54907.2022.9758851978-1-6654-5836-8WOS:000812322900014