Influence of HALO implantation on analog performance and comparison between bulk, partially-depleted and fully-depleted MOSFET's

Vancaillie, L.L.VancaillieKilchytska, V.V.KilchytskaLevacq, D.D.LevacqAdriaensen, S.S.Adriaensenvan Meer, HansHansvan MeerDe Meyer, KristinKristinDe MeyerTorrese, G.G.TorreseRaskin, J.P.J.P.RaskinFlandre, D.D.Flandre2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6966Influence of HALO implantation on analog performance and comparison between bulk, partially-depleted and fully-depleted MOSFET'sProceedings paper