Chandrasekhar, ArunArunChandrasekharBeyne, EricEricBeyneDe Raedt, WalterWalterDe RaedtNauwelaers, BartBartNauwelaers2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6094Accurate RF electrical characterisation of CSPs using MCM-D thin film technologyProceedings paper