Majeed, BivraghBivraghMajeedOprins, HermanHermanOprinsVandevelde, BartBartVandeveldeSabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanFiorini, PaoloPaoloFiorini2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19357Fabrication of an electrostatically actuated impingement cooling deviceProceedings paper