Halder, SandipSandipHalderWostyn, KurtKurtWostynAndreas, MichaelMichaelAndreasWada, MasayukiMasayukiWadaBrems, StevenStevenBremsBearda, TwanTwanBeardaPacco, AntoineAntoinePaccoKenis, KarineKarineKenisVos, RitaRitaVosMertens, PaulPaulMertens2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15424Damage cluster analysis of patterned wafers during solvent spray cleaningProceedings paper