Uniform large-area slot-die coating of soluble metal oxide semiconductor towards mass production of high-performance TFT backplanes

Katsouras, liasliasKatsourasMaas, JorisJorisMaasvan der Steen, Jan LaurensJan Laurensvan der SteenGelinck, GerwinGerwinGelinckTakata, RyoRyoTakataMarinkovic, MarkoMarkoMarinkovicNeumann, AnitaAnitaNeumannPham, Duy-VuDuy-VuPhamAnselmann, RalfRalfAnselmannKe, Tung HueiTung HueiKeSmout, SteveSteveSmoutSchols, SarahSarahSchols2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26810Uniform large-area slot-die coating of soluble metal oxide semiconductor towards mass production of high-performance TFT backplanesProceedings paper