Analysis of selectively grown epitaxial Si1-xGex by spectroscopic ellipsometry and comparison with other established techniques

Loo, RogerRogerLooCaymax, MattyMattyCaymaxLibezny, MilanMilanLibeznyBlavier, G.G.BlavierBrijs, BertBertBrijsGeenen, LucLucGeenenVandervorst, WilfriedWilfriedVandervorst2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4540Analysis of selectively grown epitaxial Si1-xGex by spectroscopic ellipsometry and comparison with other established techniquesJournal article