Snow, JimJimSnowKraus, HaraldHaraldKrausVan Doorne, PatrickPatrickVan DoorneMertens, PaulPaulMertensKovacs, FrediFrediKovacs2021-10-142021-10-142002-11https://imec-publications.be/handle/20.500.12860/6839Etching and cleaning of HfO2 deposited on SiProceedings paper