Optimization and stability of CD variability in pitch 40 nm contact holes on NXE:3300

Van Look, LieveLieveVan LookBekaert, JoostJoostBekaertFrommhold, AndreasAndreasFrommholdHendrickx, EricEricHendrickxRispens, GijsbertGijsbertRispensSchiffelers, GuidoGuidoSchiffelers2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/32084Optimization and stability of CD variability in pitch 40 nm contact holes on NXE:3300Proceedings paperhttps://doi.org/10.1117/12.2501797