Sangameswaran, SandeepSandeepSangameswaranDe Coster, JeroenJeroenDe CosterLinten, DimitriDimitriLintenScholz, MirkoMirkoScholzThijs, StevenStevenThijsGroeseneken, GuidoGuidoGroesenekenDe Wolf, IngridIngridDe Wolf2021-10-182021-10-1820100960-1317https://imec-publications.be/handle/20.500.12860/17937Investigating ESD sensitivity in electrostatic SiGe MEMSJournal article