Stochastic and systematic patterning failure mechanisms for contact-holes in EUV lithography: part 2

Vaglio Pret, AlessandroAlessandroVaglio PretDe Bisschop, PeterPeterDe BisschopSmith, MarkMarkSmithBiafore, JohnJohnBiafore2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24644Stochastic and systematic patterning failure mechanisms for contact-holes in EUV lithography: part 2Proceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1851149