Celano, UmbertoUmbertoCelanoCapogreco, ElenaElenaCapogrecoLisoni, JuditJuditLisoniArreghini, AntonioAntonioArreghiniKunert, BernardetteBernardetteKunertGuo, WeimingWeimingGuoVan den Bosch, GeertGeertVan den BoschVan Houdt, JanJanVan HoudtDe Meyer, KristinKristinDe MeyerFurnemont, ArnaudArnaudFurnemontVandervorst, WilfriedWilfriedVandervorst2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26404Direct three-dimensional observation of the conduction in poly-Si and In1-xGaxAs 3D NAND vertical channelsProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=7573430