Khazaka, RamiRamiKhazakaLima, LucasLucasLimaRosseel, ErikErikRosseelHikavyy, AndriyAndriyHikavyyD'Costa, VijayVijayD'CostaMargetis, JoeJoeMargetisTolle, JohnJohnTolleXie, QiQiXie2021-10-282021-10-282020https://imec-publications.be/handle/20.500.12860/35384Investigation of low temperature SiP epitaxy on 300 mm Si substratesMeeting abstracthttps://ecs.confex.com/ecs/prime2020/meetingapp.cgi/Paper/136934