Lithography and yield sensitivity analysis of SRAM scaling for the 32-nm node.

Nackaerts, AxelAxelNackaertsVerhaegen, StafStafVerhaegenDusa, MirceaMirceaDusaKattouw, HansHansKattouwvan Bilsen, FrankFrankvan BilsenBiesemans, SergeSergeBiesemansVandenberghe, GeertGeertVandenberghe2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12606Lithography and yield sensitivity analysis of SRAM scaling for the 32-nm node.Proceedings paper