Teugels, LieveLieveTeugelsPhilipsen, HaroldHaroldPhilipsenvan der Veen, MarleenMarleenvan der VeenDevriendt, KatiaKatiaDevriendt2021-10-292021-10-292020-11https://imec-publications.be/handle/20.500.12860/36063Molybdenum CMP for damascene applicationsMeeting abstracthttps://www.web-events.net/doc/users/840/bib/globalprogramvf.pdf